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Conference Paper Design and Fabrication of Micro-machined Micro Heaters for Metal Oxide Based Gas Sensors
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Authors
Hong Yeol Lee, Seung Eon Moon, So Jeong Park, Jae Woo Lee, Kang Ho Park, Jong Dae Kim
Issue Date
2008-11
Citation
International Conference on Nano Science and Nano Technology (GJ-NST) 2008, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Design and fabrication, Metal-oxide(MOX), Micro-machined, gas sensors
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