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Conference Paper Optimum Condition of Anisotropic Plasma Etching for Improving Bending Properties of Ionic Polymer-Metal Composites
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Authors
Nak-Jin Choi, Hyung-Kun Lee, Sun Kyung Jung, Kang-Ho Park
Issue Date
2008-11
Citation
International Conference on Nano Science and Nano Technology (GJ-NST) 2008, pp.1-1
Publisher
Gwangju-Jeonnam Nano Science and Technology Union
Language
English
Type
Conference Paper
Project Code
08MB1800, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
KSP Keywords
Anisotropic plasma etching, Bending properties, Ionic polymer-metal composites, Optimum condition