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Voltage-Regulating Properties of AlxTi1_xOy Films Exhibiting an Abrupt Current Jump
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- Authors
- Jung Wook Lim, Sun Jin Yun, Jae Yeob Shim, Hyun Tak Kim
- Issue Date
- 2008-09
- Citation
- Electrochemical and Solid-State Letters, v.11, no.11, pp.G55-G57
- ISSN
- 1099-0062
- Publisher
- Electrochemical Society (ECS)
- Language
- English
- Type
- Journal Article
- Abstract
- An AlxTi1-xOy (ATO) film grown by atomic layer deposition exhibited an abrupt current jump with the applied electric field in current-voltage measurement. The ATO device also exhibited a negative differential resistance property, which may be due to the abrupt change of carrier number or mobility. Additionally, when a voltage was applied on the ATO device connected to a resistor in series, the voltage of the ATO was regulated at a constant value. This result suggests that the ATO device can be applicable as a good voltage regulator. © 2008 The Electrochemical Society.