상세정보
학술지
Micro-machined Resistive Micro-heaters for High Temperature Gas Sensing Applications
- 발행일
- 200812
- 출처
- Electronics Letters, v.44 no.25, pp.1-2
- ISSN
- 0013-5194
- 출판사
- IET
- 협약과제
- 08MB1800, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- Presented for the first time is the design and fabrication of novel high temperature, low power consumption, and good thermal uniformity micro-heaters for environmental gas sensors. A O/N/O (SiO2/SixN y/SiO2) structure of membrane was used for stress compensation and thermal isolation. A Wheatstone-bridge type resistive Pt heating structure and a multi-ringed heat spreading structure was applied to enhance the thermal uniformity. Results show that these fabricated heaters can operate at a high temperature, have low power consumption and good thermal uniformity. The thermal efficiency of the fabricated micro-heaters is 36°C/mW. © 2008 The Institution of Engineering and Technology.
- KSP 제안 키워드
- Bridge type, Design and fabrication, Heat spreading, High temperature gas sensing, Micro-heater, Micro-machined, Sensing applications, Thermal uniformity, Wheatstone bridge, gas sensors, low power consumption