ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Journal Article Micro-machined Resistive Micro-heaters for High Temperature Gas Sensing Applications
Cited 6 time in scopus Download 0 time Share share facebook twitter linkedin kakaostory
Authors
H.-Y. Lee, S. Moon, S.J. Park, J. Lee, K.-H. Park, J. Kim
Issue Date
2008-12
Citation
Electronics Letters, v.44, no.25, pp.1-2
ISSN
0013-5194
Publisher
IET
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1049/el:20082563
Project Code
08MB1800, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
Abstract
Presented for the first time is the design and fabrication of novel high temperature, low power consumption, and good thermal uniformity micro-heaters for environmental gas sensors. A O/N/O (SiO2/SixN y/SiO2) structure of membrane was used for stress compensation and thermal isolation. A Wheatstone-bridge type resistive Pt heating structure and a multi-ringed heat spreading structure was applied to enhance the thermal uniformity. Results show that these fabricated heaters can operate at a high temperature, have low power consumption and good thermal uniformity. The thermal efficiency of the fabricated micro-heaters is 36°C/mW. © 2008 The Institution of Engineering and Technology.
KSP Keywords
Bridge type, Design and fabrication, Heat spreading, High temperature gas sensing, Micro-heater, Micro-machined, Sensing applications, Thermal uniformity, Wheatstone bridge, gas sensors, low power consumption