우리는 원자 현미경 (AFM)을 이용하여 칼코지나이드 상변화 물질인Ge$_2$Sb$_2$Te$_5$ (GST) 박막의 상변화 특성을 조사하였다. GST는 RF 스퍼터링 방법으로 200 $\sim$ 300 nm 두께로 증착하였다. 증착된 GST 박막은 비정질 상태이고, 열처리 과정을 통해서 면심입방 (fcc) 구조와조밀육방 (hcp) 구조로 결정상이 변하는 것을 확인하였다. AFM을 통한전류-전압 특성을 통해서 비정질에서 결정질로 전이될 때 임계전압이상에서 결정질로 스위칭이 일어나는 특성을 관찰하였다. 그리고, AFM 나노리소그래피를 이용하여서 나노 스케일의 결정화 실험을수행하였으며, 토포그래피 이미지 (T-image)와 전기전도 이미지(C-image)를 동시에 얻었다. 대개 C-image의 나노 와이어의 크기가T-image 크기에 비해서 크게 관찰되었으며, 이것은 결정화가 일어날 경우큰 전기 전도도 증가에 원인을 찾을 수 있다.
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