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Journal Article
서브 피피엠 레벨 미세기전 가스 센서 가스 센서
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- Issue Date
- 2008-05
- Citation
- 센서학회지, v.17, no.3, pp.183-187
- ISSN
- 1225-5475
- Publisher
- 한국센서학회
- Language
- Korean
- Type
- Journal Article
- Project Code
- 07MB2700, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee
- Abstract
- A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It ismicromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-sed layer was embeded with ZnOsensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 pm, respectively. In addition, the minimum detection levelof the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 Vfor 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The responsewas 184 mW and its operating temperature was 400oC.
- KSP Keywords
- Measured output, Output Voltage, Sensing electrodes, gas concentration, gas sensors, noise level, operating temperature, resistance ratio, sub-ppm