상세정보
학술지
서브 피피엠 레벨 미세기전 가스 센서 가스 센서
- 발행일
- 200805
- 출처
- 센서학회지, v.17 no.3, pp.183-187
- ISSN
- 1225-5475
- 출판사
- 한국센서학회
- 협약과제
- 07MB2700, 유비쿼터스 건강관리용 모듈 시스템, 박선희
- 초록
- A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It ismicromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-sed layer was embeded with ZnOsensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 pm, respectively. In addition, the minimum detection levelof the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 Vfor 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The responsewas 184 mW and its operating temperature was 400oC.
- KSP 제안 키워드
- Measured output, Output Voltage, Sensing electrodes, gas concentration, gas sensors, noise level, operating temperature, resistance ratio, sub-ppm