에너지 하베스팅 기술은 자연의 빛에너지, 인간 신체 또는 연소형 엔진으로부터의 저온 폐열에너지, 휴대용 기기 탑재/부착장치의 미세 진동에너지, 인간의 신체활동(걷거나 뛰는)으로 인한 소산에너지 등을 흡수하여 에너지 하베스팅 소자 기술을 이용하여 전기에너지로 변환, 전자 기기의 전력으로 사용하는 환경에너지 재생형 에너지원이라 할 수 있다. 유비쿼터스의 정보화 시대에는 휴대형 정보기기 등이 필수적인 기기가 될 것인데 여기에 사용되는 전력 에너지원은 소형ㆍ집적화된 기술이 필수적이다. 이때 MEMS 기술은 에너지 하베스팅 기술의 소형ㆍ집적화 기술에 크게 기여하고 극복해야할 기술에 핵심적인 기술로 사용된다. MEMS 기술이 사용되는 대표적인 에너지 하베스터 기술인 마이크로 연료전지, 마이크로 히터 엔진, Piezoelectric MPG 기술 등을 소개하였다.
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