상세정보
학술지
Transparent and Photo-stable ZnO Thin-film Transistors to Drive an Active Matrix Organic-Light- Emitting-Diode Display Panel
- 발행일
- 200902
- 출처
- Advanced Materials, v.21 no.6, pp.678-682
- ISSN
- 0935-9648
- 출판사
- WILEY-VCH Verlag GmbH & Co. KGaA
- 협약과제
- 08MB2100, 투명전자 소자를 이용한 스마트 창, 조경익
- 초록
- Photo and electrically stable transparent ZnO Thin Film Transistors (TFT) for an Active Matrix- Organic Light Emitting Diode (AM-OLED) panel was fabricated. The fabrication of a bottom emission AM-OLED back panel with a transparent ZnO-TFT array, 150 NM thick Indium-Tin-Oxide (ITO) glass was used for the substrate. A 20 nm thick ZnO semiconductor film was deposited by means of plasma assisted atomic layer deposition (PEALD), after source/drain patterning of ITO by wet etching. Trimethylaluminium (TMA) was used as an Al precursor in all the ALD experiments. The electrically table ZnO-TTFT showed quite good photo-stability and full transparent ZnO-TFT array demonstrates a successful operation of a 2.5 inch sized bottom emission AM-blue OLED panel. ZnO-TTFT with a water-vapor precursor processed Al2O3 dielectric is very effective as a driver for an efficient AM-OLED display.
- KSP 제안 키워드
- 20 nm, AM-OLED, Blue OLEDs, Display Panel, OLED display, Organic light-emitting diodes(OLEDS), Plasma assisted atomic layer deposition(PA-ALD), Semiconductor films, TFT array, Thin-Film Transistor(TFT), Water vapor