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Identifying Resonance Frequency Deviations for High Order Nano-Wire Ring Resonator Filters based on a Coupling Strength Variation
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- Authors
- Sahnggi Park, Kap-Joong Kim, Duk-Jun Kim, Gyung Ock Kim
- Issue Date
- 2009-02
- Citation
- Silicon Photonics IV (SPIE 7220), v.7220, pp.1-12
- Language
- English
- Type
- Conference Paper
- Abstract
- Third order ring resonators are designed and their resonance frequency deviations are analyzed experimentally by processing them with E-beam lithography and ICP etching in a CMOS nano-Fabrication laboratory. We developed a reliable method to identify and reduce experimentally the degree of deviation of each ring resonance frequency before completion of the fabrication process. The identified deviations can be minimized by the way to be presented in this paper. It is expected that this method will provide a significant clue to make a high order multi-channel ring resonators. © 2009 SPIE.