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Conference Paper Multi-Channel Silicon Ring Resonator Fabricated by DUV Lithography and Temperatureinsensitive Silicon-Slot Waveguide
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Authors
Jong Moo Lee
Issue Date
2009-02
Citation
Silicon Photonics IV (SPIE 7220), v.7220, pp.1-1
Publisher
SPIE
Language
English
Type
Conference Paper
KSP Keywords
DUV lithography, Silicon ring resonator, Slot waveguide, multi-channel
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