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A Piezoelectric Microspeaker with a High-Quality PMN-PT Single-Crystal Membrane
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- Authors
- Hye Jin Kim, Sung Q Lee, Sang Kyun Lee, Kang Ho Park
- Issue Date
- 2009-02
- Citation
- Journal of the Korean Physical Society, v.54, no.2, pp.1-4
- ISSN
- 0374-4884
- Publisher
- 한국물리학회 (KPS)
- Language
- English
- Type
- Journal Article
- Abstract
- We have designed and fabricated a piezoelectric microspeaker with a lead magnesium niobatelead titanate (PMN-PT) single-crystal membrane. The PMN-PT piezoelectric membranes were designed with inter-digitated electrodes (IDEs) to obtain a higher sound output from the speakers. The PMN-PT microspeakers were successfully fabricated using silicon-based microelectromechanical systems (MEMS) technology and had a thickness of just 0.5 mm and an area of just 1.5 × 1.5 cm2. The areas of the 10-um-thick PMN-PT active regions were just 1.2 × 1.2 cm2. The measured output sound pressure levels (SPL) of the microspeakers were about 85 dB SPL between 800 Hz and 7 kHz with an input drive of 14 Vp-k at a distance of 1 cm, which produces a competitive output compared to other commercial microspeakers. Also, the displacements at the center of the PMN-PT membrane (with an input voltage of 1 Vp-k) were measured to be 2.5 um and 4.1 um at the 1st resonant frequency of 840 Hz and the 2nd resonant frequency of 2.3 kHz, respectively.
- KSP Keywords
- High-quality, Input voltage, Lead magnesium niobate-lead titanate, Measured output, Micro-electro-mechanical system(MEMS), PMN-PT, Pressure level, Resonant frequency(Fr), Single crystal, Sound pressure, active region