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학술지 A Piezoelectric Microspeaker with a High-Quality PMN-PT Single-Crystal Membrane
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김혜진, 이성규, 이상균, 박강호
Journal of the Korean Physical Society, v.54 no.2, pp.1-4
한국물리학회 (KPS)
08MB1800, 유비쿼터스 단말용 부품 모듈, 김종대
We have designed and fabricated a piezoelectric microspeaker with a lead magnesium niobatelead titanate (PMN-PT) single-crystal membrane. The PMN-PT piezoelectric membranes were designed with inter-digitated electrodes (IDEs) to obtain a higher sound output from the speakers.The PMN-PT microspeakers were successfully fabricated using silicon-based microelectromechanical systems (MEMS) technology and had a thickness of just 0.5 mm and an area of just 1.5 × 1.5 cm2.The areas of the 10-um-thick PMN-PT active regions were just 1.2 × 1.2 cm2. The measured output sound pressure levels (SPL) of the microspeakers were about 85 dB SPL between 800 Hz and 7 kHz with an input drive of 14 Vp-k at a distance of 1 cm, which produces a competitive output compared to other commercial microspeakers. Also, the displacements at the center of the PMN-PT membrane (with an input voltage of 1 Vp-k) were measured to be 2.5 um and 4.1 um at the 1st resonant frequency of 840 Hz and the 2nd resonant frequency of 2.3 kHz, respectively.
KSP 제안 키워드
High-quality, Input voltage, Lead magnesium niobate-lead titanate, Measured output, Micro-electro-mechanical system(MEMS), PMN-PT, Pressure level, Resonant frequency(Fr), Single crystal, Sound pressure, active region