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Conference Paper The Characterization of SiC/Si-QD Embedded A-SiN Layer by an Excimer Laser Annealing
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Authors
K.H. Kim, C. Huh, H.S. Ko, B.G. Kim, W.J. Kim, G.Y. Sung
Issue Date
2009-02
Citation
한국반도체 학술 대회 (KCS) 2009, pp.76-77
Language
English
Type
Conference Paper