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Journal Article
Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor
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- Authors
- S. E. Moon, E.-K. Kim, H.-Y. Lee, J.-W. Lee, J. Park, S.-J. Park, J.-H. Kwak, K.-H. Park, J. Kim, G.-H. Jo, T.-H. Lee
- Issue Date
- 2009-02
- Citation
- Journal of the Korean Physical Society, v.54, no.2, pp.830-834
- ISSN
- 0374-4884
- Publisher
- 한국물리학회 (KPS)
- Language
- English
- Type
- Journal Article
- Abstract
- High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor- liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by using electron beam lithography and photolithography and their current-voltage characteristics were mea- sured after a post process to acquire reproducible devices for possible applications as a chemical gas sensor. The temperature-dependent current-voltage characteristics were measured to investigate the temperature-dependant electrical transport properties for possible applications as a chemi- cal gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
- KSP Keywords
- Chemical gas sensor, Chemical sensors, Electrical transport properties, Electron beam lithography, Gas response, High-quality, Nanowire gas sensor, Post process, Single-crystalline, Temperature-dependent, current-voltage characteristics