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Journal Article Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor
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Authors
S. E. Moon, E.-K. Kim, H.-Y. Lee, J.-W. Lee, J. Park, S.-J. Park, J.-H. Kwak, K.-H. Park, J. Kim, G.-H. Jo, T.-H. Lee
Issue Date
2009-02
Citation
Journal of the Korean Physical Society, v.54, no.2, pp.830-834
ISSN
0374-4884
Publisher
한국물리학회 (KPS)
Language
English
Type
Journal Article
Abstract
High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor- liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by using electron beam lithography and photolithography and their current-voltage characteristics were mea- sured after a post process to acquire reproducible devices for possible applications as a chemical gas sensor. The temperature-dependent current-voltage characteristics were measured to investigate the temperature-dependant electrical transport properties for possible applications as a chemi- cal gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
KSP Keywords
Chemical gas sensor, Chemical sensors, Electrical transport properties, Electron beam lithography, Gas response, High-quality, Nanowire gas sensor, Post process, Single-crystalline, Temperature-dependent, current-voltage characteristics