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Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor
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- 발행일
- 200902
- 출처
- Journal of the Korean Physical Society, v.54 no.2, pp.830-834
- ISSN
- 0374-4884
- 출판사
- 한국물리학회 (KPS)
- 협약과제
- 08MB1800, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor-liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by usingelectron beam lithography and photolithography and their current-voltage characteristics were mea-sured after a post process to acquire reproducible devices for possible applications as a chemical gassensor. The temperature-dependent current-voltage characteristics were measured to investigatethe temperature-dependant electrical transport properties for possible applications as a chemi-cal gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
- KSP 제안 키워드
- Gas response, High-quality, I-V characteristic(Transport property), Nanowire gas sensor, Post process, Single-crystalline, Temperature-dependent, Vapor-liquid-solid (vls), chemical sensor, current-voltage characteristics, electrical transport properties