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Conference Paper
High-Quality LTCC Solenoid Inductor Using Air Cavity on Silicon Wafer for 3D Integrated Circuit
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- Authors
- Hyun Cheol Bae, Kwang Seong Choi, Jong Tae Moon, Ju Yeon Hong, Seung Hyeub Oh, Yong Il Jun
- Issue Date
- 2009-03
- Citation
- International Conference and Exhibition on Device Packaging (IMAPS) 2009, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- 3D integrated circuit(IC), Air cavity, High-quality, Silicon wafer, solenoid inductor