ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Conference Paper High-Quality LTCC Solenoid Inductor Using Air Cavity on Silicon Wafer for 3D Integrated Circuit
Cited - time in scopus Share share facebook twitter linkedin kakaostory
Authors
Hyun Cheol Bae, Kwang Seong Choi, Jong Tae Moon, Ju Yeon Hong, Seung Hyeub Oh, Yong Il Jun
Issue Date
2009-03
Citation
International Conference and Exhibition on Device Packaging (IMAPS) 2009, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
3D integrated circuit(IC), Air cavity, High-quality, Silicon wafer, solenoid inductor