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비정질 실리콘 기반의 비냉각형 16×16 적외선 초점면배열의 개발
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- Issue Date
- 2009-07
- Citation
- 센서학회지, v.18, no.4, pp.301-306
- ISSN
- 1225-5475
- Publisher
- 한국센서학회
- Language
- Korean
- Type
- Journal Article
- Abstract
- This paper describes the design and fabrication of 16×16 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of −2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of 6×10-11 was extracted. Finally, we obtained detectivity of 1.27×109cmHz0.5/W and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.
- KSP Keywords
- 1/f Noise, Bias voltage, Design and fabrication, Infrared Focal Plane Array(IRFPA), Noise factor, Thermal time constant(TTC), amorphous silicon, focal plane array(FPA), frame rate(FR), noise equivalent temperature difference, temperature coefficient of resistance(TCR)