상세정보
학술지
Monolithic Double Rectangular Spiral Thin-Film Inductors Implemented with NiFe Magnetic Cores for On-Chip Dc-Dc Converter Applications
- 발행일
- 200905
- 출처
- Thin Solid Films, v.517 no.14, pp.4204-4206
- ISSN
- 0040-6090
- 출판사
- Elsevier
- 협약과제
- 08MB1300, IT융복합 공동시험환경구축, 강진영
- 초록
- This paper describes a simple, on-chip complimentary metal oxide semiconductor (CMOS) compatible thin-film inductor applied for the dc-dc converters. The double rectangular spiral types of the thin-film inductors were implemented with 15혻μm-thick copper films upon 2.5혻μm thick of the NiFe magnetic core. Prior to fabricating a high-voltage CMOS dc-dc converter circuit, the NiFe magnetic core was deposited on the polyimide film. Adapting a double-rectangular structure, the fabricated monolithic inductor exhibited not only high inductance of 1.6혻μH but also high quality factor of 11.2 at 5혻MHz. To simplify the integration process, the planarization process for the top magnetic core was eliminated. The performance of the dc-dc converter which combined with our proposed inductors was evaluated at a high power efficiency of 81% when the converter operated at a frequency of 5혻MHz corresponding to input and output voltages of 3.3혻V and 8.1혻V, respectively. © 2009 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- Complementary metal-oxide-semiconductor(CMOS), Converter Circuit, DC-DC Converters, High quality factor, High-Voltage CMOS, Metal-oxide(MOX), NiFe magnetic core, On-chip, Planarization process, Quality-factor(Q-factor), Rectangular Spiral