상세정보
학술지
Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution
- 발행일
- 200907
- 출처
- Optics Express, v.17 no.14, pp.11884-11891
- ISSN
- 1094-4087
- 출판사
- Optical Society of America(OSA)
- 협약과제
- 09MB1100, 실리콘 기반 초고속 광인터커넥션 IC, 김경옥
- 초록
- It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss. © 2009 Optical Society of America.
- KSP 제안 키워드
- Channel spacing, Coupling Coefficient, Design rule, E-beam Lithography, KOH silicon etching, KOH solution, Minimum width, Nitride layer, Resonance frequency, Resonant frequency(Fr), Ring Resonator