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학술지 High Performance thin Film Transistor with Cosputtered Amorphous Zn-In-Sn-O Channel : Combinatorial Approach
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저자
유민기, 양신혁, 박상희, 황치선, 정재경
발행일
200908
출처
Applied Physics Letters, v.95 no.7, pp.072104-1-072104-3
ISSN
0003-6951
출판사
American Institute of Physics (AIP)
DOI
https://dx.doi.org/10.1063/1.3206948
협약과제
09MB2900, 투명전자 소자를 이용한 스마트 창, 조경익
초록
Thin film transistors with a channel of Zn-In-Sn-O were fabricated via a combinatorial rf sputtering method. It was found that the role of the In atoms is to enhance the mobility and to shift the threshold voltage (Vth) negatively. On the other hand, the Sn fraction is critical for improving the overall trap density including the density-of-states of the bulk channel layer and the interfacial trap density at the ZnInSnO interface. The optimized transistor was obtained at a compositional ratio of Zn:In:Sn=40:20:40, which exhibited an excellent subthreshold gate swing of 0.12 V/decade, Vth of -0.4 V, and high Ion/off ratio of > 109 as well as a high field-effect mobility of 24.6 cm2 /V s. © 2009 American Institute of Physics.
KSP 제안 키워드
Channel layer, Combinatorial approach, Density of states, High performance, Interfacial trap, Sputtering method, Thin-Film Transistor(TFT), Zn-In-Sn-O, high field-effect mobility, rf sputtering, thin film(TF)