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Journal Article Templated Assembly of Metal Nanoparticles in Nanoimprinted Patterns for Metal Nanowire Fabrication
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Authors
Eun Uk Kim, Kang Jun Baeg, Yong Young Noh, Dong Yu Kim, Tak Hee Lee, In Kyu Park, Gun Young Jung
Issue Date
2009-09
Citation
Nanotechnology, v.20, no.35, pp.1-6
ISSN
0957-4484
Publisher
Institute of Physics (IOP)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1088/0957-4484/20/35/355302
Abstract
We have developed a new method that combines nanoimprint lithography and metal nanoparticle solution processing for fabricating metal nanowires. A polymer template with nanoscale features, fabricated by nanoimprint lithography, provided physical reservoirs which were filled with a silver nanoparticle solution during the spin-coating. After the lift-off process, the defined silver nanoparticle patterns were annealed to enhance the conductivity for use as electrodes. Silver nanowire patterns (500nm linewidth with a 300nm gap) were fabricated without using an expensive high-vacuum system for metal deposition. This method demonstrated pattern resolution enhancement compared with ink-jet printing which inherently suffers from ink spreading on the substrate surface. By using this method, organic thin film transistors composed of the solution-processed silver source/drain electrodes with a channel length of 300nm were fabricated and showed comparable behaviors to those with vacuum-deposited electrodes. © 2009 IOP Publishing Ltd.
KSP Keywords
Channel Length, High vacuum, Inkjet printing, Lift-off process, Nanoimprint lithography(NIL), Nanoparticle solution, Nanoscale features, Silver nanoparticle(AgNP), Silver nanowires(AgNWs), Solution processing, Solution-processed