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Conference Paper
A High Density Nano-Scale N-Channel Trench Gate Power MOSFET using Self-Aligned Technique
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- Authors
- Sang Gi Kim, Hoon Soo Park, Yong Gu Kim, Jin Gun Koo, Kun Sik Park, Jin Ho Lee
- Issue Date
- 2009-09
- Citation
- International Conference on Microwave and Photonics (ICMAP) 2009, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- High-density, N-channel, nano-scale, power MOSFET, self-Aligned, trench gate