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Conference Paper A High Density Nano-Scale N-Channel Trench Gate Power MOSFET using Self-Aligned Technique
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Authors
Sang Gi Kim, Hoon Soo Park, Yong Gu Kim, Jin Gun Koo, Kun Sik Park, Jin Ho Lee
Issue Date
2009-09
Citation
International Conference on Microwave and Photonics (ICMAP) 2009, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
High-density, N-channel, nano-scale, power MOSFET, self-Aligned, trench gate