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Conference Paper Fabrication and Characterization of Ti-Doped I TO f Ilms Deposited by DC Magnetron Sputtering
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Authors
Sung Mook Chung, Woo Seok Cheong, Jae Heon Shin, Min Ki Ryu, Chi Sun Hwang, Kyoung Ik Cho
Issue Date
2009-09
Citation
International Conference on Microwave and Photonics (ICMAP) 2009, pp.1-9
Language
English
Type
Conference Paper
KSP Keywords
Fabrication and characterization, Ti-doped, dc Magnetron sputtering