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Conference Paper High-Speed RPCVD Ge Waveguide Photodetector
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Authors
Dong Woo Suh, Ji Ho Joo, Sang Hoon Kim, Gyung Ock Kim
Issue Date
2009-09
Citation
International Conference on Group IV Photonics (GFP) 2009, pp.16-18
Publisher
IEEE
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/GROUP4.2009.5338306
Project Code
09MB1100, Silicon-based high-speed optical interconnection IC, Kim Gyungock
Abstract
We report high-speed waveguide photodetectors with RPCVD-grown Ge on SOI. The device exhibits a 3dB bandwidth of-50 GHz, a responsivity of 0.8 A/W, and a low dark current of 35 nA at {\\lambda}-1.55 μm. © 2009 IEEE.
KSP Keywords
High Speed, Low dark current, Waveguide photodetector