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Journal Article High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode
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Authors
Jeong Woo Park, Jong Bum You, In Gyoo Kim, Gyung Ock Kim
Issue Date
2009-08
Citation
Optics Express, v.17, no.18, pp.15520-15524
ISSN
1094-4087
Publisher
Optical Society of America(OSA)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1364/OE.17.015520
Abstract
We present a high phase-shift efficienct Mach-Zehnder silicon optical modulator based on the carrier-depletion effect in a highly-doped PN diode with a small waveguide cross-sectional area. The fabricated modulator show a V ?I ? of 1.8V쨌cm and phase shifter loss of 4.4dB/mm. A device using a 750 μm-long phase-shifter exhibits an eye opening at 12.5Gbps with an extinction ratio of 3 dB. Also, an extinction ratio of 7 dB is achieved at 4 Gbps for a device with a 2 mm-long phase shifter. Further enhancement of the extinction ratio at higher operating speed can be achieved using a travelling-wave electrode design and the optimal doping. © 2009 Optical Society of America.
KSP Keywords
2 mm, Carrier depletion, Cross-sectional area(CSA), Depletion effect, Electrode Design, Extinction Ratio(ER), Mach-Zehnder(MZ), Operating speed, PN diode, Phase Shifter, Silicon optical modulator
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