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Highly-Sensitive NO2 Detection of ZnO Nanorods Grown by a Sonochemical Process
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- 발행일
- 200909
- 출처
- Journal of the Korean Physical Society, v.55 no.3, pp.1119-1122
- ISSN
- 0374-4884
- 출판사
- 한국물리학회 (KPS)
- 협약과제
- 09MB2800, 모바일 플렉시블 입출력 플랫폼, 조경익
- 초록
- Solution-based growth is utilized to grow ZnO nanorods at room temperature in a very efficientand cost-saving way to make a thin-?lm device. We fabricated a NO2-gas-sensitive ZnO-nanorod(NR) device by spin-coating a solution containing ZnO NRs on a patterned substrate and obtainedgood electrical properties having Ohmic contact between the ZnO NR sensing layer and the metalelectrodes. We also studied the gas-sensing property of ZnO-NR-based sensor under N2 and dry aircondition and con?rmed that our sensor showed a very high sensitivity to NO2 gas with concentra-tions much below the sub-ppm level.
- KSP 제안 키워드
- Gas sensing properties, High Sensitivity, Highly sensitive, NO2 detection, Ohmic contact, Patterned substrate, Room-temperature, Sensing layer, Sensitivity to, Sonochemical process, Spin coating