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Conference Paper
Fabrication of ZnO TFTs by Micro-Contact Printing of Silver Ink Electrodes
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- Authors
- Hong Sik Shin, Ho Jin Yun, Dong Ho Nam, Kwang Il Choi, Kyu Ha Baek, Kun Sik Park, Lee Mi Do, Hi Deok Lee, Jin Suk Wang, Ga Won Lee
- Issue Date
- 2009-10
- Citation
- International Meeting on Information Display (IMID) 2009, pp.1600-1603
- Language
- English
- Type
- Conference Paper
- Abstract
- In this work, we have fabricated inverted staggered ZnO TFTs with 1-µm resolution channel length by micro contact printing (µ-CP) method. Patterning of micro scale source/drain electrodes without etching is successfully achieved by micro contact printing method by using silver ink and polydimethylsiloxane (PDMS) stamp. And the time dependent characteristics of the sheet resistance show that Ag inklayer could be used as source and drain electrodes for ZnO TFTs.
- KSP Keywords
- Channel Length, Inverted staggered, Micro-scale, Microcontact printing(CP), Polydimethylsiloxane (PDMS) stamp, Source/drain electrodes, Time-dependent, contact printing method, sheet resistance, silver ink