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Conference Paper
High Performance Transparent Conducting Ga-Doped ZnO film Deposited by RF-Magnetron Sputter Deposition Technique
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- Authors
- Jun Kwan Kim, Jae Min Lee, Jung Wook Lim, Je Ha Kim, Sun Jin Yun
- Issue Date
- 2009-10
- Citation
- International Conference on Solid State Devices and Materials (SSDM) 2009, pp.1-2
- Language
- English
- Type
- Conference Paper
- Project Code
- 09MB5500, 광캡쳐 구조 반사방지막 및 조성기울기를 갖는 Si/SiGe 박막 태양전지 기술 개발, Sun Jin Yun
- KSP Keywords
- Ga-doped ZnO, High performance, RF-magnetron sputter deposition, Sputter deposition technique, Transparent conducting, ZnO films