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Conference Paper High Performance Transparent Conducting Ga-Doped ZnO film Deposited by RF-Magnetron Sputter Deposition Technique
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Authors
Jun Kwan Kim, Jae Min Lee, Jung Wook Lim, Je Ha Kim, Sun Jin Yun
Issue Date
2009-10
Citation
International Conference on Solid State Devices and Materials (SSDM) 2009, pp.1-2
Language
English
Type
Conference Paper
KSP Keywords
Ga-doped ZnO, High performance, RF-magnetron sputter deposition, Sputter deposition technique, Transparent conducting, ZnO films