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Conference Paper Opto-Electrical Properties of Ti-Doped ITO Films Prepared by DC Magnetron Sputtering
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Authors
Sung Mook Chung, Jae Heon Shin, Woo Seok Cheong, Min Ki Ryu, Chi Sun Hwang, Kyoung Ik Cho
Issue Date
2009-11
Citation
International Symposium on Electroceramics (ISE) 2009, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
ITO film, Ti-doped ITO, dc Magnetron sputtering, electrical properties(I-V curve), optoelectrical properties