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Conference Paper
Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique
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- Authors
- Jun Kwan Kim, Jae Min Lee, Jung Wook Lim, Je Ha Kim, Sun Jin Yun
- Issue Date
- 2009-11
- Citation
- International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Electrical properties, Ga-doped ZnO(GZO), RF-magnetron sputter deposition, Sputter deposition technique, ZnO thin films, thermal stability, thin film(TF)