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Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique
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- 발행일
- 200911
- 출처
- International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
- KSP 제안 키워드
- Ga-doped ZnO, RF-magnetron sputter deposition, Sputter deposition technique, Thermal stability(TGA), ZnO thin films, electrical properties(I-V curve), thin film(TF)