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Conference Paper Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique
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Authors
Jun Kwan Kim, Jae Min Lee, Jung Wook Lim, Je Ha Kim, Sun Jin Yun
Issue Date
2009-11
Citation
International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Electrical properties, Ga-doped ZnO(GZO), RF-magnetron sputter deposition, Sputter deposition technique, ZnO thin films, thermal stability, thin film(TF)