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Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique
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- 발행일
- 200911
- 출처
- International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
- 협약과제
- 09MB5500, 광캡쳐 구조 반사방지막 및 조성기울기를 갖는 Si/SiGe 박막 태양전지 기술 개발, 윤선진
- KSP 제안 키워드
- Ga-doped ZnO, RF-magnetron sputter deposition, Sputter deposition technique, Thermal stability(TGA), ZnO thin films, electrical properties(I-V curve), thin film(TF)