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Journal Article
On-chip, Planar Integration of Er Doped Silicon-rich Silicon Nitride Microdisk with SU-8 Waveguide with Sub-micron Gap Control
- Authors
- Jee Soo Chang, Seok Chan Eom, Gun Yong Sung, Jung H. Shin
- Issue Date
- 2009-12
- Citation
- Optics Express, v.17, no.25, pp.22918-22924
- ISSN
- 1094-4087
- Publisher
- Optical Society of America(OSA)
- Language
- English
- Type
- Journal Article
- Abstract
- On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by processrelated roughness. © 2009 Optical Society of America.
- KSP Keywords
- 5 nm, Er-doped, Gap control, High Temperature, Optical damage, Polymer cladding, Q factor, SU-8, Silicon-rich silicon nitride, back-end, doped silicon
This work is distributed under the term of Creative Commons License (CCL)
(CC BY)
(CC BY)
