상세정보
학술지
On-chip, Planar Integration of Er Doped Silicon-rich Silicon Nitride Microdisk with SU-8 Waveguide with Sub-micron Gap Control
- 발행일
- 200912
- 출처
- Optics Express, v.17 no.25, pp.22918-22924
- ISSN
- 1094-4087
- 출판사
- Optical Society of America(OSA)
- 협약과제
- 09ZC1400, 메가컨버전스 핵심기술 개발, 손승원
- 초록
- On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by processrelated roughness. © 2009 Optical Society of America.
- KSP 제안 키워드
- 5 nm, Er-doped, Gap control, High Temperature, On-chip, Optical damage, Polymer cladding, Quality-factor(Q-factor), SU-8, Silicon-rich silicon nitride, back-end