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Biosensors using the Si nanochannel junction-isolated from the Si bulk substrate
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- Authors
- Chang-Geun Ahn, Chan Woo Park, Jong-Heon Yang, Chil Seong Ah, An Soon Kim, Tae-Youb Kim, Han Young Yu, Moon Gyu Jang, Sang-Hoon Kim, In-Bok Baek, Seong Jae Lee, Gun Yong Sung
- Issue Date
- 2009-12
- Citation
- Journal of Applied Physics, v.106, no.11, pp.1-6
- ISSN
- 0021-8979
- Publisher
- American Institute of Physics(AIP)
- Language
- English
- Type
- Journal Article
- Abstract
- The biosensor using a silicon nanochannel field effect transistor has been developed on the basis of a bulk silicon substrate instead of an expensive silicon-on-insulator material, for low cost applications. "Top-down" fabricated Si nanochannels for detecting prostate specific antigen (PSA) are electrically isolated from the bulk Si substrate only by a reverse-biased p-n junction with very low reverse leakage currents. The reverse leakage current flowing through the p-n junction is small enough to be ignored, when compared with the current flowing through the p -type Si channel; roughly 100 times lower. The surface immobilization of anti-PSA has been confirmed by the specific binding test of DNA stabilized Au nanoparticles (NPs), showing 1200 NPs/μ m2 and atomic force microscopy surface analysis. The injection of 10 ng/ml PSA solutions leads to a clear increase in the conductance of Si nanochannels, indicating the specific binding of PSA with the immobilized anti-PSA. The similar signal changes were observed on the injection of the 1 pg/ml PSA, very low concentration of PSA. © 2009 American Institute of Physics.
- KSP Keywords
- Atomic force microscope(AFM), Au nanoparticles(Au-NPs), Field-effect transistors(FETs), Insulator material, Low concentration, Low-cost, P-N junction, Petri net(PN), Reverse leakage current, Si channel, Si nanochannel