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Journal Article Design and Fabrication of Tb3+-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications
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Authors
정훈, 이신영, Gun Yong Sung, 신중훈
Issue Date
201101
Source
IEEE Photonics Technology Letters, v.23 no.2, pp.88-90
ISSN
1041-1135
Publisher
IEEE
DOI
https://dx.doi.org/10.1109/LPT.2010.2091268
Project Code
11ZC1100, Mega Convergence Core Technology Development, Ham Ho-Sang
Abstract
We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated. © 2006 IEEE.
KSP Keywords
Design and fabrication, Low-cost, Quality-factor(Q-factor), Tb-doped, Whispering gallery modes, doped silicon, microdisk resonator, silicon oxynitride