상세정보
학술지
Design and Fabrication of Tb3+-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications
- 저자
- 정훈, 이신영, 성건용, 신중훈
- 발행일
- 201101
- 출처
- IEEE Photonics Technology Letters, v.23 no.2, pp.88-90
- ISSN
- 1041-1135
- 출판사
- IEEE
- 협약과제
- 11ZC1100, 메가컨버전스 핵심기술 개발, 함호상
- 초록
- We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated. © 2006 IEEE.
- KSP 제안 키워드
- Design and fabrication, Low-cost, Quality-factor(Q-factor), Tb-doped, Whispering gallery modes, doped silicon, microdisk resonator, silicon oxynitride