상세정보
학술지
Amorphous In-Sn-Zn-O Films Deposited on Polymer and Glass Substrates Using Co-Sputtering System
- 저자
- 방준호, 이동엽, 김상현, 정우석, 송풍근
- 발행일
- 201108
- 출처
- Journal of Nanoelectronics and Optoelectronics, v.6 no.3, pp.369-374
- ISSN
- 1555-130X
- 출판사
- American Scientific Publishers
- 협약과제
- 11VB1600, 윈도우 일체형 30인치급 터치센서 개발, 정우석
- 초록
- This study examined the effect of the Zn concentration on the electrical and mechanical properties of ITO films on glass and PET substrates. Amorphous In-Sn-Zn-O (ITZO) films were successfully prepared on glass and polyethylene terephthalate (PET) substrates at room temperature. Deposition was carried out by magnetron co-sputtering system using two cathodes equipped with ITO targets (doped with 5, 7, 10 wt% SnO 2) and ZnO target as the In-Sn source and Zn source, respectively. The concentration of Zn in In-Sn-Zn-O films was controlled by adjusting the RF power supplied to the ZnO target while maintaining a constant DC power supply to the ITO target. It was confirmed that electrical properties, surface uniformity and mechanical durability were improved by the introduction of Zn atoms. The lowest resistivity (2.95×10 ?4?뎑m) was obtained for the ITZO films deposited on PET substrate using an ITO target doped with 7 wt% SnO 2. © 2011 American Scientific Publishers All rights reserved.
- KSP 제안 키워드
- Constant DC, Glass substrate, ITO film, ITO target, In-Sn-Zn-O, Magnetron co-sputtering system, Mechanical durability, Mechanical properties(PMCs), Polyethylene terephthalate (PET) substrates, RF Power, Room-temperature