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Amorphous In-Sn-Zn-O Films Deposited on Polymer and Glass Substrates Using Co-Sputtering System
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- Authors
- Bang Joonho, Lee Dongyeop, Kim Sanghyun, Cheong Wooseok, Song Pungkeun
- Issue Date
- 2011-08
- Citation
- Journal of Nanoelectronics and Optoelectronics, v.6, no.3, pp.369-374
- ISSN
- 1555-130X
- Publisher
- American Scientific Publishers
- Language
- English
- Type
- Journal Article
- Abstract
- This study examined the effect of the Zn concentration on the electrical and mechanical properties of ITO films on glass and PET substrates. Amorphous In-Sn-Zn-O (ITZO) films were successfully prepared on glass and polyethylene terephthalate (PET) substrates at room temperature. Deposition was carried out by magnetron co-sputtering system using two cathodes equipped with ITO targets (doped with 5, 7, 10 wt% SnO 2) and ZnO target as the In-Sn source and Zn source, respectively. The concentration of Zn in In-Sn-Zn-O films was controlled by adjusting the RF power supplied to the ZnO target while maintaining a constant DC power supply to the ITO target. It was confirmed that electrical properties, surface uniformity and mechanical durability were improved by the introduction of Zn atoms. The lowest resistivity (2.95×10 ?4?뎑m) was obtained for the ITZO films deposited on PET substrate using an ITO target doped with 7 wt% SnO 2. © 2011 American Scientific Publishers All rights reserved.
- KSP Keywords
- Constant DC, Electrical properties, Glass substrate, ITO film, ITO target, In-Sn-Zn-O, Magnetron co-sputtering system, Mechanical durability, Mechanical properties(PMCs), Polyethylene terephthalate (PET) substrates, RF Power