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Journal Article Use of a Columnar Metal Thin Film as a Nanosieve with Sub‐10 nm Pores
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Authors
Dong-Hoon Choi, Yong Duk Han, Byung-Kee Lee, Seon-Jin Choi, Hyun C. Yoon, Dae-Sik Lee, Jun-Bo Yoon
Issue Date
2012-07
Citation
Advanced Materials, v.24, no.32, pp.4408-4413
ISSN
0935-9648
Publisher
John Wiley & Sons
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1002/adma.201200755
Abstract
A columnar-structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight-opened nanopores, which is an ideal structure for a nanosieve. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
KSP Keywords
Co. KGaA, Columnar grains, Ideal structure, Metal thin film, physical vapor deposition, thin film(TF)