상세정보
학술지
Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Ink Jetting Technique
- 발행일
- 201510
- 출처
- Sensors and Actuators B : Chemical, v.217, pp.146-150
- ISSN
- 0925-4005
- 출판사
- Elsevier
- 협약과제
- 13VB4900, 구동 변위 10% 이상의 촉감과 3단계 이상의 질감 표현이 가능한 센싱과 구동 기능의 멀티터치센서 기초원천기술 개발, 안성덕
- 초록
- Abstract Micro alcohol gas sensor was fabricated based on micro-heater by using CMOS compatible MEMS process and ink jetting technique. The paste for ink jetting deposition was based on semiconducting In2O3 powder. In the structure of micro-heater, two semi-circled Pt heaters, where some etching holes including etching hole in the center of the micor-heater exist, are connected to the spreader for thermal uniformity and reduction of the Si etching time. Based on the above design, low power consumption alcohol gas sensor was fabricated, which showed substantial sensitivity down to 0.05 ppm alcohol at low power consumption (24 mW).
- KSP 제안 키워드
- Alcohol gas sensor, CMOS-compatible, Etching hole, MEMS process, Micro-heater, Sensor based, Si etching, Thermal uniformity, etching time, low power consumption