BROWSE
Detail
Conference Paper
A Nano-Focus X-Ray Source Using Carbon Nanotube Field Emitters for Semiconductor Inspections
Cited - time in 
Share 
Share
- Authors
- Yoon-Ho Song, Jae-Woo Kim, Min-Sik Shin, Hyojin Jeon, Jin-Woo Jeong, Jun-Tae Kang, Sungyoul Choi, Sora Park, Young Chul Choi, Ji-Hwan Yeon, SungHee Kim, Sung-Jun Ahn
- Issue Date
- 2015-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2015, pp.522-522
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Carbon nano-tube(CNT), X-ray sources, field emitter