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학술지 Locally-Tailored Structure of an Elastomeric Substrate for Stretchable Circuits
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저자
박찬우, 정순원, 나복순, 오지영, 박래만, 이상석, 구재본
발행일
201512
출처
Semiconductor Science and Technology, v.31 no.2, pp.1-6
ISSN
0268-1242
출판사
Institute of Physics (IOP)
DOI
https://dx.doi.org/10.1088/0268-1242/31/2/025013
협약과제
14MB1400, 미래광고 서비스를 위한 에너지절감형 환경적응 I/O (Input/Output) 플랫폼 기술 개발, 황치선
초록
We demonstrate a new process for fabricating a hybrid elastomeric polydimethylsiloxane (PDMS) substrate, which can provide a high ratio (as large as ~50) of the elastic modulus between the active device region and the interconnect area, as well as a locally tailored surface profile for each region. For this process, a Si master mold with a dual surface profile is prepared, where locally flat regions are distributed within a wavy-surfaced area. The stiffer elastomeric islands for active devices are formed on the flat regions by photolithography of a photo-patternable and hard PDMS layer (E ~ 160 MPa), over which a soft PDMS layer (E ~ 2 to 3 MPa) is casted. By releasing the whole PDMS layer from the mold, a hybrid silicone substrate with stiff and flat islands embedded within a soft and wavy matrix is obtained. In this hybrid structure, active devices located on the stiff regions can provide high reliability under stretched conditions, while most strain is accommodated by wavy interconnects within the soft area. Such beneficial effects are demonstrated by organic thin film transistors produced on the hybrid substrate.
KSP 제안 키워드
Active devices, High Reliability, Hybrid structure, Hybrid substrate, Master mold, Organic thin-film transistors, Surface profile, Thin-Film Transistor(TFT), each region, elastic modulus, elastomeric substrate