Journal Article
A Low Temperature, Solution-Processed Poly(4-vinylphenol), YOx Nanoparticle Composite/Polysilazane Bi-Layer Gate Insulator for ZnO Thin Film Transistor
Low temperature, solution-processed metal oxide thin film transistors (MEOTFTs) have been widely investigated for application in low-cost, transparent, and flexible electronics. To enlarge the application area, solution-processed gate insulators (GI) have been investigated in recent years. We investigated the effects of the organic/inorganic bi-layer GI to ZnO thin film transistors (TFTs). PVP, YOx nanoparticle composite, and polysilazane bi-layer showed low leakage current (~10-8 A/cm2 in 2 MV), which are applicable in low temperature processed MEOTFTs. Polysilazane was used as an interlayer between ZnO and PVP, YOx nanoparticle composite as a good charge transport interface with ZnO. By applying the PVP, YOx nanoparticle composite/polysilazane bi-layer structure to ZnO TFTs, we successfully suppressed the off current (Ioff) to ~10-11 and fabricated good MEOTFTs in 180 °C.
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