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Journal Article
Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification
- Authors
- Yi-Gyeong Kim, Min-Hyung Cho, Jaewoo Lee, Young-Deuk Jeon, Tae Moon Roh, Chun-Gi Lyuh, Woo Seok Yang, Jong-Kee Kwon
- Issue Date
- 2016-04
- Citation
- ETRI Journal, v.38, no.2, pp.235-243
- ISSN
- 1225-6463
- Publisher
- 한국전자통신연구원 (ETRI)
- Language
- English
- Type
- Journal Article
- Abstract
- A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of 114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a 136 μA current consumption. The chip is occupied with an active area of 0.35 mm2 and a chip area of 0.54 mm2.
- KSP Keywords
- 20 Hz, Active area, Amplification technique, Bias voltage, Chip area, Current consumption, Front-End, Low noise, MEMS Microphone, Micro-electro-mechanical system(MEMS), Microphone readout