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Conference Paper
Open-Circuit Sensitivity Model based on Empirical Parameters for a Capacitive-type MEMS Acoustic Sensor
- Authors
- Jaewoo Lee, J.H. Jeon, C.H. Je, S.Q. Lee, W.S. Yang, S.-G. Lee
- Issue Date
- 2015-09
- Citation
- International Conference on Materials and Applications for Sensors and Transducers (IC-MAST) 2015, pp.1-10
- Language
- English
- Type
- Conference Paper
- Abstract
- An empirical-based open-circuit sensitivity model for a capacitive-type MEMS acoustic sensor is presented. To intuitively evaluate the characteristic of the open-circuit sensitivity, the empirical-based model is proposed and analysed by using a lumped spring-mass model and a pad test sample without a parallel plate capacitor for the parasitic capacitance. The model is composed of three different parameter groups: empirical, theoretical, and mixed data. The empirical residual stress from the measured pull-in voltage of 16.7 V and the measured surface topology of the diaphragm were extracted as +13 MPa, resulting in the effective spring constant of 110.9 N/m. The parasitic capacitance for two probing pads including the substrate part was 0.25 pF. Furthermore, to verify the proposed model, the modelled open-circuit sensitivity was compared with the measured value. The MEMS acoustic sensor had an open- circuit sensitivity of -43.0 dBV/Pa at 1 kHz with a bias of 10 V, while the modelled open- circuit sensitivity was -42.9 dBV/Pa, which showed good agreement in the range from 100 Hz to 18 kHz. This validates the empirical-based open-circuit sensitivity model for designing capacitive-type MEMS acoustic sensors.
- KSP Keywords
- Acoustic Sensor, Capacitive-type, Empirical parameters, Lumped Spring-Mass Model, Parallel plate capacitor, Parasitic Capacitance, Proposed model, Residual stress, Spring constant, Surface topology, mixed data
This work is distributed under the term of Creative Commons License (CCL)
(CC BY)
(CC BY)
