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Conference Paper
Open-Circuit Sensitivity Model based on Empirical Parameters for a Capacitive-type MEMS Acoustic Sensor
- Authors
- Jaewoo Lee, J.H. Jeon, C.H. Je, S.Q. Lee, W.S. Yang, S.-G. Lee
- Issue Date
- 2015-09
- Citation
- International Conference on Materials and Applications for Sensors and Transducers (IC-MAST) 2015, pp.1-10
- Language
- English
- Type
- Conference Paper
- Abstract
- An empirical-based open-circuit sensitivity model for a capacitive-type MEMS acoustic sensor is presented. To intuitively evaluate the characteristic of the open-circuit sensitivity, the empirical-based model is proposed and analysed by using a lumped spring-mass model and a pad test sample without a parallel plate capacitor for the parasitic capacitance. The model is composed of three different parameter groups: empirical, theoretical, and mixed data. The empirical residual stress from the measured pull-in voltage of 16.7 V and the measured surface topology of the diaphragm were extracted as +13 MPa, resulting in the effective spring constant of 110.9 N/m. The parasitic capacitance for two probing pads including the substrate part was 0.25 pF. Furthermore, to verify the proposed model, the modelled open-circuit sensitivity was compared with the measured value. The MEMS acoustic sensor had an open- circuit sensitivity of -43.0 dBV/Pa at 1 kHz with a bias of 10 V, while the modelled open- circuit sensitivity was -42.9 dBV/Pa, which showed good agreement in the range from 100 Hz to 18 kHz. This validates the empirical-based open-circuit sensitivity model for designing capacitive-type MEMS acoustic sensors.
- KSP Keywords
- Acoustic Sensor, Capacitive-type, Empirical parameters, Lumped Spring-Mass Model, Parallel plate capacitor, Parasitic Capacitance, Proposed model, Spring constant, Surface topology, mixed data, model-based
This work is distributed under the term of Creative Commons License (CCL)
(CC BY)
(CC BY)
