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Journal Article Sputter Deposition of Sn-doped ZnO/Ag/Sn-doped ZnO Transparent Contact Layer for GaN LED Applications
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Authors
Nae-Man Park, Munsik Oh, Yun-Been Na, Woo-Seok Cheong, Hyunsoo Kim
Issue Date
2016-10
Citation
Materials Letters, v.180, pp.72-76
ISSN
0167-577X
Publisher
Elsevier
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1016/j.matlet.2016.05.111
Abstract
Sn-doped ZnO/Ag/Sn-doped ZnO (ZAZ) multilayers prepared using sputtering process was employed in GaN-based blue light-emitting diodes(LEDs) as transparent contact layers (TCLs). The ZAZ layer had better optical and electrical properties without any thermal annealing. The ZAZ TCLs improved the current spreading on p-GaN layer and increased the light output power in the large area devices. The efficiency droop was also quite small in the case of adopting a ZAZ TCL in GaN-based LEDs. These results are promising for the development of a ZAZ TCL using sputtering process for GaN LED applications.
KSP Keywords
Blue light-emitting diodes, GaN LED, GaN-based LEDs, LED applications, Light output power(Lop), Optical and electrical properties, Sn-doped ZnO, Thermal annealing, current spreading, efficiency droop, electrical properties(I-V curve)