상세정보
학술지
Toward Sub-micron Oxide Thin-film Transistors for Digital Holography
- 발행일
- 201702
- 출처
- Journal of the Society for Information Display, v.25 no.2, pp.126-135
- ISSN
- 1071-0922
- 출판사
- Society for Information Display (SID)
- 초록
- We fabricated, high performance 2-쨉m-channel oxide thin-film transistors (TFT) on glass substrate for 7-쨉m-pixel pitch spatial light modulator (SLM) panel for digital holographic applications. Furthermore, we succeeded, in the demonstration of the sub-micron TFTs, which is an inevitable route to the next-generation spatial light modulation devices with near 1-쨉m pixel pitch.
- KSP 제안 키워드
- Glass substrate, High performance, Next-generation, Spatial light modulator(SLM), Thin-Film Transistor(TFT), digital holography, oxide thin-film transistors, spatial light modulation, sub-micron, thin film(TF)