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학술지 Attogram Mass Sensing based on Silicon Microbeam Resonators
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백인복, 변상원, 이봉국, 류진화, 김약연, 윤용선, 장원익, 이성재, 유한영
Scientific Reports, v.7, pp.1-10
Nature Publishing Group
17HS5600, 정신 질환의 모니터링 및 징후 예측을 위한 피부 부착형 센서 모듈 개발, 김승환
Using doubly-clamped silicon (Si) microbeam resonators, we demonstrate sub-attogram per Hertz (ag/Hz) mass sensitivity, which is extremely high sensitivity achieved by micro-scale MEMS mass sensors. We also characterize unusual buckling phenomena of the resonators. The thin-film based resonator is composed of a Si microbeam surrounded by silicon nitride (SiN) anchors, which significantly improve performance by providing fixation on the microbeam and stabilizing oscillating motion. Here, we introduce two fabrication techniques to further improve the mass sensitivity. First, we minimize surface stress by depositing a sacrificial SiN layer, which prevents damage on the Si microbeam. Second, we modify anchor structure to fiind optimal design that allows the microbeam to oscillate in quasi-one dimensional mode while achieving high quality factor. Mass loading is conducted by depositing Au/Ti thin films on the local area of the microbeam surface. Using sequential mass loading, we test effects of changing beam dimensions, position of mass loading, and distribution of a metal film on the mass sensitivity. In addition, we demonstrate that microbeams suffer local micro-buckling and global buckling by excessive mass loading, which are induced by two different mechanisms. We also find that the critical buckling length is increased by additional support from the anchors.
KSP 제안 키워드
Critical buckling length, Fabrication techniques, Global buckling, High Sensitivity, High quality factor, Mass loading, Mass sensing, Mass sensor, Micro-scale, One-dimensional, Quality-factor(Q-factor)