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Epitaxial Junction Termination Extension (Epi-JTE) for SiC Power Devices
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- Authors
- Doohyung CHO, Kunsik PARK, Jongil WON, Sanggi KIM, Kwansgsoo KIM
- Issue Date
- 2017-05
- Citation
- IEICE Transactions on Electronics, v.E100.C, no.5, pp.439-445
- ISSN
- 1745-1353
- Publisher
- 일본, 전자정보통신학회 (IEICE)
- Language
- English
- Type
- Journal Article
- Abstract
- In this paper, Epitaxial (Epi) Junction Termination Extension (JTE) technique for silicon carbide (SiC) power device is presented. Unlike conventional JTE, the Epi-JTE doesn't require high temperature (about 500°C) implantation process. Thus, it doesn't require high temperature (about 1700°C) process for implanted dose activation and surface defect curing. Therefore, the manufacturing cost will be decreased. Also, the fabrication process is very simple because the dose of the JTE is controlled by epitaxy growth. The blocking characteristic is analyzed through 2Dsimulation for the proposed Epi-JTE. In addition, the effect was validated by experiment of fabricated SiC device with the Single-Zone-Epi-JTE. As a result, it has blocking capability of 79.4% compared to ideal parallel-plane junction breakdown.
- KSP Keywords
- Blocking capability, Epitaxy growth, Fabrication process, High Temperature, Junction termination extension(JTE), SiC device, SiC power devices, Surface defects, manufacturing cost, silicon carbide(3C-SiC)