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Conference Paper
Toward Sub-micron Oxide Thin-Film Transistors for Digital Holography
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- Authors
- Ji Hun Choi, Jae-Eun Pi, Chi-Young Hwang, Jong-Heon Yang, Gi Heon Kim, Yong-Hae Kim, Hee-Ok Kim, Oh-Sang Kwon, Eun-Suk Park, Chi-Sun Hwang
- Issue Date
- 2017-05
- Citation
- Society for Information Display (SID) International Symposium 2017, pp.394-397
- Language
- English
- Type
- Conference Paper
- Project Code
- 16MF1400, Development of Telecommunications Terminal with Digital Holographic Table-top Display, Jin Woong Kim
- Abstract
- We fabricated, high performance 2-쨉m-channel oxide thin-film transistors (TFT) on glass substrate for 7-쨉m-pixel pitch spatial light modulator (SLM) panel for digital holographic applications. Furthermore, we succeeded, in the demonstration of the sub-micron TFTs, which is an inevitable route to the next-generation spatial light modulation devices with near 1-쨉m pixel pitch.
- KSP Keywords
- Glass substrate, High performance, Next-generation, Spatial light modulator(SLM), Thin-Film Transistor(TFT), digital holography, oxide thin-film transistors, spatial light modulation, sub-micron, thin film(TF)