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Conference Paper Indium Oxide Thin Films Grown by PEALD using Triethylindium Liquid Precursor and O2 Plasma for TFTs
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Authors
Jeho Na, Jung Wook Lim, Tae Yoon Kim, Sung Hyun Lee, Sun Jin Yun
Issue Date
2017-06
Citation
International Forum on Functional Materials (IFFM) 2017, pp.253-253
Language
English
Type
Conference Paper
KSP Keywords
Indium oxide thin films, Liquid precursor, thin film(TF)
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