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학술지 MEMS-Based NO2 Gas Sensor Using ZnO Nano-Rods for Low-Power IoT Application
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저자
이재우, 김준수, 임종필, 임솔이, 이승민, 권정윤, 문승언
발행일
201705
출처
Journal of the Korean Physical Society, v.70 no.10, pp.924-928
ISSN
0374-4884
출판사
한국물리학회 (KPS)
DOI
https://dx.doi.org/10.3938/jkps.70.924
초록
A micro-electro-mechanical-system (MEMS)-based NO2 gas sensor was fabricated and characterized by using ZnO nano-rods for the Internet of Things (IoT) monitoring system. The implementation process was fully compatible with the standard 6-inch 0.8-μm complementary metal oxide semiconductor (CMOS) process for mass-production, resulting in the simple 5-photomask process. In addition, for high sensitivity applications, semiconducting ZnO nano-rods were chosen and synthesized using the hydrothermal method at temperatures below 100 °C. Based on the ZnO nano-rods and the fast response time of a MEMS-based heater, the NO2 gas sensor had a sensitivity of 0.36 at 0.5 ppm. Furthermore, a power consumption of 15 mW in the normal operation mode was achieved with a MEMS-based micro-heater, showing that the preliminary result can be applied for IoT applications operating at low power.
KSP 제안 키워드
Complementary metal-oxide-semiconductor(CMOS), High Sensitivity, IOT applications, Implementation process, Internet of thing(IoT), Low-power IoT, MEMS-based, Metal-oxide(MOX), Micro-electro-mechanical system(MEMS), Micro-heater, Monitoring system