상세정보
학술대회
Passive and Active Wavelength Trimming of Temperature-Insensitive Silicon MZI
- 저자
- 이종무, 김민수, 안준태, Laetitia Adelmini, Daivid Fowler, Christophe Kopp, Claudio J Oton, Francesco Testa
- 발행일
- 201708
- 출처
- International Conference on Group IV Photonics (GFP) 2017, pp.119-120
- 협약과제
- 17SB1100, 초고속 저전력 광 인터커넥트 구현을 위한 온도무의존 소자 요소 기술, 이종무
- 초록
- Temperature-insensitive silicon MZI with local heaters is fabricated by DUV lithography. Temperature dependence is less than 5pm/°C but the wavelength can be tuned by the local heater at the efficiency of 24mW/FSR. The results are discussed in comparison with permanent wavelength trimming by thermal annealing.
- KSP 제안 키워드
- DUV lithography, Local heaters, Thermal annealing, temperature dependence, temperature-insensitive