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Conference Paper
Passive and Active Wavelength Trimming of Temperature-Insensitive Silicon MZI
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- Authors
- Jong-Moo Lee, Min-su Kim, Joon Tae Ahn, Laetitia Adelmini, Daivid Fowler, Christophe Kopp, Claudio J Oton, Francesco Testa
- Issue Date
- 2017-08
- Citation
- International Conference on Group IV Photonics (GFP) 2017, pp.119-120
- Language
- English
- Type
- Conference Paper
- Abstract
- Temperature-insensitive silicon MZI with local heaters is fabricated by DUV lithography. Temperature dependence is less than 5pm/°C but the wavelength can be tuned by the local heater at the efficiency of 24mW/FSR. The results are discussed in comparison with permanent wavelength trimming by thermal annealing.
- KSP Keywords
- DUV lithography, Local heaters, Thermal annealing, temperature dependence, temperature-insensitive