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학술지 Control of PN-Junction Turn-on Voltage in 4H-SiC merged PiN Schottky Diode
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저자
박준보, 박건식, 원종일, 김기환, 구상모, 김상기, 문재경
발행일
201704
출처
Applied Physics Letters, v.110 no.14, pp.1-5
ISSN
0003-6951
출판사
American Institute of Physics (AIP)
DOI
https://dx.doi.org/10.1063/1.4979790
협약과제
17ZB1400, SiC 기반 트렌치형 차세대 전력소자 핵심기술 개발, 김상기
초록
We present numerical simulation results and experimental measurements that explain the physical mechanism behind the high critical voltage, Vcrit, required to turn on a pn junction in a merged PiN Schottky (MPS) diode. The 2D simulation of potential distribution within a unit MPS cell demonstrated that the potential gradient set by the Schottky junction raises the potential barrier formed at the pn junction, thereby increasing Vcrit. Based on this knowledge, we propose that changing the ratio of the Schottky contact and the p+ region area, as well as shallow p-doping of the Schottky interface, can be used to control the magnitude of Vcrit. We present simulation and measurement results that demonstrate the feasibility of our approach.
KSP 제안 키워드
2D Simulation, 4H-SiC, Critical Voltage, Experimental measurements, Merged Pin Schottky diode, Numerical simulations, P-N junction, Physical mechanism, Potential barrier, Potential gradient, Region area