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Conference Paper Fabrication of Schottky Barrier Diodes on AlGaN/GaN Heterostructures on CVD Diamond Substrate
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Authors
Kim Zin-Sig, Hyung Seok Lee, Bae Sung-Bum, Eun Soo Nam
Issue Date
201709
Source
Asia-Pacific Workshop on Widegap Semiconductors (APWS) 2017, pp.1-1
Project Code
17ZB1500, Developement of key material and device technologies for next generation semiconductor devices with extreme performance, Leem Young Ahn
KSP Keywords
AlGaN/GaN heterostructure, Cvd diamond, diamond substrate, schottky barrier diode(SBD)