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Conference Paper MEMS Capacitive Microphone with Dual-Anchored Membrane
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Authors
Chang Han Je, Ju Hyun Jeon, Sung Q. Lee, Woo Seok Yang
Issue Date
2017-09
Citation
Eurosensors 2017, pp.1-5
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.3390/proceedings1040342
Abstract
In this paper, we proposed a MEMS capacitive microphone with a dual-anchored membrane. The proposed dual anchor could minimize the deviation of operating characteristics of the membrane according to the fabrication process variation. The membrane is connected and fixed to the back plate insulating silicon nitride structures instead to the sacrificial bottom insulating oxide layer so that its effective size and boundary conditions are not changed according to the process variation. The proposed dual-anchored MEMS microphone is fabricated by the conventional fabrication process without no additional process and mask. It has a sensing membrane of 500 μm diameter, an air gap of 2.0 μm and 12 dual anchors of 15 μm diameter. The resonant frequency and the pull-in voltage of the fabricated device is 36.3 ± 1.3 kHz and 6.55 ± 0.20 V, respectively.
KSP Keywords
Air-gap, Boundary conditions, Effective Size, MEMS Microphone, MEMS capacitive microphone, Operating characteristics, Oxide layer, Resonant frequency(Fr), Sensing membrane, Silicon Nitride, fabrication process
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CC BY