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Conference Paper MEMS Capacitive Microphone with Dual-Anchored Membrane
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Authors
Chang Han Je, Ju Hyun Jeon, Sung Q. Lee, Woo Seok Yang
Issue Date
2017-09
Citation
Eurosensors 2017, pp.1-5
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.3390/proceedings1040342
Project Code
17ZB1800, Development of Environment & UserAdaptable MEMS Microphone Solution, Yang Woo Seok