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Conference Paper MEMS Capacitive Microphone with Dual-Anchored Membrane

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Authors: Chang Han Je, Ju Hyun Jeon, Sung Q. Lee, Woo Seok Yang

Issue Date: 2017-09

Citation: Eurosensors 2017, pp.1-5

Language: English

Type: Conference Paper

DOI: https://dx.doi.org/10.3390/proceedings1040342

Project Code: 17ZB1800, Development of Environment & UserAdaptable MEMS Microphone Solution, Yang Woo Seok

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